DC-4000

pic-ex-6Key features

  • High repetition rate up to 4 kHz
  • High output power up to 160 W
  • Metal ceramic design
  • Solid state switch
  • Long lifetime
  • Energy stabilisation

Specification

ArF KrF
Wavelength 193 nm 248 nm
Nominal Pulse Energy 20 mJ 40 mJ
Max repetition rate 4000 Hz
Max Average Power 80 W 160 W
Pulse Duration1 17 ns
Stability of pulse energy sigma < 2%
Beam Size (V x H) 1 14 mm x 2.5 mm
Beam Divergency (V x H) 1 3.5 mrad x 1 mrad
Time jitter < 2 ns
Dimensions (L/W/H)
Laser HeadPower Supply; with Control Systems
1360mm x 640mm x 520mm; 800mm x 520mm x 1000mm
Weight 360kg
Cooling water < 3 liter/min
Power Consumption 380/220V, 50Hz, 4.5kW
Gas 1 premix cylinder or 3 separate vessels for Ne, F2/He, Kr (Ar)
Control RS485/Windows

1 – FWHM