DC-4000

pic-ex-6Key features:

  • High repetition rate up to 4 kHz
  • High output power up to 160 W
  • Metal ceramic design
  • Solid state switch
  • Long lifetime
  • Energy stabilisation

Applications:

  • Sours of radiation for high repetition rate laser systems
ArF KrF
Wavelength (nm) 193 248
Nominal Pulse Energy (mJ) 20 40
Max repetition rate (Hz) 4000
Max Average Power (W) 80 160
Pulse Duration (ns) 17
Stability of pulse energy (sigma, %)  < 2
Beam Size (V x H, mm) 14 x 2.5
Beam Divergency (V x H, mrad) 3.5 x 1
Jitter (ns) < 2
Dimensions (L x W x H, mm)
Laser HeadPower Supply; with Control Systems
1360 x 640 x 520; 800 x 520 x 1000
Weight (kg) 360
Cooling water < 3 liter/min
Power Consumption 380/220V, 50Hz, 4.5kW
Gas 1 premix cylinder or 3 separate vessels for Ne, F2/He, Kr (Ar)
Control RS485/Windows