CLS-5000

Key features:

  • Very high beam position stability
  • Very high beam pointing stability
  • High repetition rate
  • Magnetic switch generator
  • Compact excimer laser
  • Built-in Energy monitor
  • Energy stabilization

Applications:

  • Manufacturing of diffraction structures in optical fibers
  • Materials processing
  • Laser engraving (diamons, optical elements)
  • Laser vision correction
  • Spectroscopy

 Specifications:

 

ArF KrF XeCl
Wavelength (nm)* 193 248 308
Maximum repetition rate (Hz)  500
Maximum pulse energy (mJ) 15 25 12
Stability of pulse energy (sigma, %)  < 2
Beam size (at 1/e2 of peak, V x H mm) 6 x 3,5 6  x 4 6  x 4
Beam divergency (FWHM, V x H mrad) 1 x 1
Pulse duration (ns) 11 12 12
Dimensions (L x W x H, mm) 887 х 336 х 454
Weight (kg) 85
Power consumption 220 V, 50 Hz, 1000 VA * *
Cooling water < 1 l/min
Gas 1 premix cylinder
Control RS 232, Windows
* – option wavelength 157 nm
** – option 110V/60 Hz, 1000 VA

Excimer laser CLS 5000 (pdf file)