CLS-5000

Key features:CLS-5000

  • Very high beam position stability
  • Very high beam pointing stability
  • High repetition rate
  • Magnetic switch generator
  • Compact excimer laser
  • Built-in Energy monitor
  • Energy stabilization

 Specification

ArF KrF XeCl
Wavelength 193 nm 248 nm 308 nm
Max. Repetition Rate 500 Hz
Max. Pulse Energy 15 mJ 25 mJ 12 mJ
Energy  Stability sigma < 2%
Beam Size (V x H) 1 6 mm x 3,5 mm 6 mm x 4 mm 6 mm x 4 mm
Beam Divergency (V x H) 1 2 mrad x 1 mrad
Pulse Duration 1 11 ns 12 ns 12 ns
Dimensions, mm3 887L х 336W х 454H
Weight, kg 85
Power Consumption 220V, 50Hz, 1kW
Cooling water < 1 liter/min
Gas 1 premix cylinder
Control RS 232, Windows

1 – FWHM

 

pic-ex-7

Dimensional drawing of laser system CLS-5000