CL-7700

pic-ex-3

Key features:

  • High pulse energy
  • Metal ceramic design
  • Energy stabilization
  • PC control
  • Built-in Energy monitor
  • Oil free vacuum pump
  • Premix gases

Applications:

  • PLD systems
  • Materials processing

Specification:

ArF KrF
Wavelength (nm) 193 248
Max. pulse energy (mJ) 350 700
Max. repetition rate (Hz)
20 / 50
Average Power (W) 6 / 15 12 / 30
Pulse duration (ns) 20 25
Energy stability (sigma, %)
 < 2
Beam dimension (mm) 28 (vertical) x 10 (horizontal)
Beam divergency, mrad 4.5 (vertical) х 2 (horizontal)
Cooling water > 1 l/min
Gases Premix
Control RS 232, Windows
Electrical 380/220 V, 50/60 Hz, 4 kW
Dimensions (L x W x H) mm 1423 x 375 x 760
Weight (kg)
190