CL-7500

pic-ex-4Key features

  • Narrow linewidth excimer laser
  • MOPA design – Master Oscillator & Power
  • Amplifier
  • Wavelength tuning

 

 

Specification

ArF KrF
Wavelength 193 nm 248 nm
Linewidth < 3 pm
Nominal Pulse Energy 100 mJ 250 mJ
Max repetition rate
CL 7520
CL 7550
20 Hz
50 Hz
Pulse Duration1 ~ 20 ns
Stability of pulse energy sigma < 2%
Beam Size (V x H) 1 20 mm x 6 mm
Beam Divergency (V x H) 1 < 0.2 mrad
Spatial coherence >5 mm
Temporal coherence >10 mm
Time jitter < 2 ns
Dimensions (L/W/H) 2000mm x 800mm x 747mm
Cooling water < 3 liter/min
Power Consumption 380/220V, 50Hz,7kW
Gas 1 premix cylinder
Control RS 232, Windows

1 – FWHM