CL-7500

pic-ex-4Key features:

  • Narrow linewidth excimer laser
  • MOPA design – Master Oscillator & Power
  • Amplifier
  • Wavelength tuning

Applications:

  • FBG writing

Specifications:

ArF KrF
Wavelength (nm) 193 248
Linewidth (pm) < 3
Nominal Pulse Energy (mJ) 100 250
Max repetition rate (Hz)
CL 7520
CL 7550
20
50
Pulse Duration (ns)  ~ 20
Stability of pulse energy (sigma, %) < 2
Beam Size (FWHM, V x H, mm) 20 x 6
Beam Divergency (FWHM, V x H, mrad) < 0.2
Spatial coherence (mm) >5
Temporal coherence (mm) >10
Jitter (ns) < 2
Dimensions (L x W x H, mm) 2000 x 800 x 747
Cooling water < 3 liter/min
Power Consumption 380/220V, 50Hz,7kW
Gas 1 premix cylinder
Control RS 232, Windows