CL-7000k

pic-ex-5Key features

  • 1000 Hz Excimer laser
  • High beam pointing stability
  • Energy stabilization

 

Specification

ArF KrF XeCl
Wavelength 193 nm 248 nm 308 nm
Nominal Pulse Energy 24 mJ 40 mJ 20 mJ
Average Power 20 W 35 W 18 W
Max repetition rate 1000 Hz
Pulse Duration1 14 ns 20 ns 20 ns
Stability of pulse energy sigma < 2%
Time Stability ± 2 ns
Beam Size (V x H) 1 16 mm x 5 mm (6 mm x 5 mm – optional)
Cooling water < 3 liter/min
Gas 1 premix cylinder
Control RS 232, Windows
Power Consumption 380/220V, 50Hz, 3,5kW
Dimensions (L/W/H) 1360L x 382W x 720H
Weight 170kg

1 – FWHM