CL-7000

Key features:

  • High pulse energy
  • Metal ceramic design
  • Long lifetime premix
  • Reliable thyratron switch
  • Built-in Energy monitor
  • Energy stabilization
  • Air-cooled versions up to 20 Hz

Applications:

  • Manufacturing of diffraction structures in optical fibers
  • Materials processing
  • Laser Lift-Off process
  • Laser engraving
  • Pulsed laser deposition

Specifications:

ArF KrF XeCl
Wavelength (nm)* 193 248 308
Tube material metal & ceramic
Preionization spark
Max. Pulse Energy (mJ) 250 400 300
Average Power (W)
CL 7020
CL 7050
CL 7100
5
12
25
8
20
35
6
15
25
Max. repetition rate (Hz)
CL 7020
CL 7050
CL 7100

20
50
100

Pulse Duration (ns) 17 20 20
Stability of pulse energy (sigma, %) <2
Beam Size (V x H, mm) 20 x 6 21 x 6 22 x 6
Beam Divergency (V x H, mrad)

4.5 x 1.5 (stable resonator)

Jitter (ns)

<2

Dimensions (L x W x H, mm)

1423 x 375 x 760

Weight (kg)

170

Cooling
CL 7020
CL 7050
CL 7100

air
water <1 l/min
water <3 l/min

Power Consumption
CL 7020
CL 7050
CL 7100

220 V, 50 Hz, 1.5 kW**
220 V, 50 Hz, 1.8 kW**
380V, 50 Hz, 3.5 kW**

Gas 1 premix cylinder
Control RS 232, Windows

* – option wavelength 157 nm

** – option 110 V (220 V)/60 Hz