CL-7000

Key features

  • High pulse energypic-ex-5
  • Metal ceramic design
  • Long lifetime Thyratron switch
  • Built-in Energy monitor
  • Energy stabilization
  • Air-cooled versions up to 20 Hz

 

Specification

ArF KrF XeCl
Wavelength 193 nm 248 nm 308 nm
Nominal Pulse Energy 250 mJ 400 mJ 300 mJ
Average Power
CL 7020
CL 7050
CL 7100
5 W
12 W
25 W
8 W
20 W
35 W
6 W
15 W
25 W
Max repetition rate
CL 7020
CL 7050
CL 7100

20 Hz
50 Hz
100 Hz

Pulse Duration1 17 ns 20 ns 20 ns
Stability of pulse energy sigma < 2%
Beam Size (V x H) 1 20 mm x 6 mm 21 mm x 6 mm 22 mm x 6 mm
Beam Divergency (V x H) 1

4.5 mrad x 1.5 mrad (stable resonator)

Time jitter

< 2 ns

Dimensions (L/W/H)

1360mm x 382mm x 720mm

Weight

170kg

Cooling
CL 7020
CL 7050
CL 7100

air
water < 1 liter/min
water < 3 liter/min

Power Consumption
CL 7020
CL 7050
CL 7100

220V, 50Hz, 1,5kW
220V, 50Hz, 1,8kW
380/220V, 50Hz, 3,5kW

Gas 1 premix cylinder
Control RS 232, Windows

1 – FWHM