CL-5000

  Key features:

  • Compact excimer laser
  • Energy stabilization
  • Long lifetime of gas mixture
  • Computer control
  • All-in-one module
  • Premix gas mixture

Applications:

  • Manufacturing of diffraction structures in optical fibers
  • Materials processing
  • Laser engraving (diamons, optical elements)
  • Laser vision correction
  • Spectroscopy

Specifications:

 

ArF KrF XeCl
Wavelength (nm)* 193 248 308
Tube material metal & ceramic
Preionization corona
Maximum Pulse Energy (mJ)
20 40 25
Maximum Average Power (W)
CL 5100
CL 5200
CL 5300
2
4
5
4
8
10
2.5
5
7
Max repetition rate (Hz)
CL 5100
CL 5200
CL 5300
100
200
300
Pulse Duration (ns) 8-11
Stability of pulse energy (sigma, %)  < 2
Beam Size (at 1/eof peak, V x H mm)
12 x 3.5
12 x 4
Beam Divergency (FWHM, V x H mrad) 4 x 2 (stable resonator)
Jitter (ns) < 2
Dimensions (L x W x H, mm) 780  x 330  x 583
Weight (kg) 80
Cooling
CL 5100
CL 5200/5300
air
water <1 l/min
Power Consumption 220 V, 50 Hz, ≤ 1000 VA * *
Gas 1 premix cylinder
Control RS 232, Windows
* – option wavelength 157 nm
** – option 110V/60 Hz, ≤ 1000 VA