CL-5000

pic_ex

Key features:

  • Compact excimer laser
  • Metal ceramic design
  • Long lifetime Thyratron switch
  • Built-in Energy monitor
  • Energy stabilization
  • Air-cooled versions up to 100 Hz

 

Specification

  ArF KrF XeCl
Wavelength 193 nm 248 nm 308 nm
Nominal Pulse Energy 20 mJ 40 mJ 25 mJ
Average Power      
CL 5100
CL 5200
CL 5300
2 W
4 W
5 W
4 W
8 W
10 W
2.5 W
5 W
7 W
Max repetition rate      
CL 5100
CL 5200
CL 5300
100 Hz
200 Hz
300 Hz
Pulse Duration1 8-10 ns 9-11 ns
Stability of pulse energy sigma < 2%
Beam Size (V x H) 1 12 mm x 5 mm 12 mm x 5 mm
Beam Divergency (V x H) 1 4 mrad x 2 mrad (stable resonator)
Time jitter < 2 ns
Dimensions, mm 780L x 330W x 583H
Weight, kg 80
Cooling
CL 5100
CL 5200/5300
air
water < 1 liter/min
Power Consumption 220V, 50Hz, 1,5 kW
Gas 1 premix cylinder
Control RS 232, Windows