Excimer Lasers

 

Excimer Laser CL-5000

  • Compact excimer laser
  • Metal ceramic design
  • Long lifetime Thyratron switch
  • Built-in Energy monitor
  • Energy stabilization
  • Air-cooled versions up to 100 Hz


Excimer laser CLS-5000

  • Very high beam position stability
  • Very high beam pointing stability
  • High repetition rate
  • Magnetic switch generator
  • Compact excimer laser
  • Built-in Energy monitor
  • Energy stabilization


Excimer laser CL-7000

  • High pulse energy
  • Metal ceramic design
  • Long lifetime Thyratron switch
  • Built-in Energy monitor
  • Energy stabilization
  • Air-cooled versions up to 20 Hz


Excimer laser CL-7500

  • Narrow linewidth excimer laser
  • MOPA design – Master Oscillator & Power Amplifier
  • Wavelength tuning

Excimer laser CL-7000k

  • 1000 Hz Excimer laser
  • High beam pointing stability
  • Energy stabilization

Excimer laser DC-4000

  • High repetition rate up to 4 kHz
  • High output power up to 160 W
  • Metal ceramic design
  • Solid state switch
  • Long lifetime
  • Energy stabilization